Fabrication of nanoelectrodes combining standard microfabrication processes and focused ion beam ( FIB )
نویسنده
چکیده
A. Errachid, E. Martínez, C. Mills, G. Villanueva, J. Bausells, J. Samitier Laboratory of Nanobioengineering (CREBEC), Barcelona Science Park, Josep Samitier 1-5, 08028 Barcelona, Spain. E-mail: [email protected], http://www.pcb.ub.esT Nanotechnology Platform, Barcelona Science Park, Josep Samitier 1-5, 08028 Barcelona, Spain Centro Nacional de Microelectrónica (IMB-CSIC), Campus UAB, 08193 Bellaterra, Barcelona, Spain
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تاریخ انتشار 2004